Precision CNC Machining for Semiconductor & Vacuum Components
Ultra-tolerance CNC machining, low-outgassing materials, and cleanroom assembly for critical OEM equipment.
ISO 14001:2015 ISO 9001:2015 IATF 16949:2016
UHV & Semiconductor Parts Manufacturing
Semiconductor and high-vacuum equipment manufacturers require ultra-precise, low-outgassing, contamination-free critical parts complying with strict SEMI and ISO quality specifications. CustomParts-MFG delivers full-cycle component manufacturing covering early DFM design optimization, rapid prototyping, multi-axis precision machining, specialized low-particle surface treatment and Class 100/1000 cleanroom assembly. Our integrated production realizes seamless transition from lab prototype to volume mass production, supports precision module integration and full lifecycle quality traceability, alongside optimized specialty raw material procurement for high-purity alloys and advanced ceramics.
The precision and attention to detail in these prototypes perfectly matched our specifications. They significantly accelerated our development timeline and were a pleasure to collaborate with.
Core Component Categories & Industrial Application Scenarios
Semiconductor Wafer Fabrication Components
We produce core spare parts for etching, deposition and lithography processes: custom electrostatic chucks (ESC), process kit parts including focus rings, showerheads and gas distribution plates, precision wafer handling end-effectors, lift pins and beamline apertures for ion implantation equipment. All products feature outstanding flatness, stable thermal performance and zero particle shedding to guarantee consistent wafer processing yield.
Ultra-High Vacuum & Analytical Instrument Parts
Custom vacuum chamber housings, CF/ISO standard flanges, multi-type electrical/fluid feedthroughs, thin-film deposition heating stages and precision aperture cones for SEM, TEM and mass spectrometry analytical devices, designed for stable operation under extreme UHV working conditions.
High-Purity Specialized Material Selection Capability
We select industry-specific low-outgassing raw materials tailored for plasma and vacuum environment:
- High-purity metals: 6061/7075 aluminum, 304L-VIM/VAR stainless steel, titanium alloy, OFHC oxygen-free copper for thermal & conductive needs
- Technical ceramics & composites: Alumina, AlN, SiC, fused quartz with excellent plasma and high-temperature resistance
- High-performance engineering plastics: PEEK, VESPEL PI, PFA for vacuum insulation and sealing applications
Advanced Precision Machining Technology Portfolio
Multi-Axis Precision Fabrication
5-axis CNC for complex monolithic chamber and chuck structures; precision grinding for ultra-flat sealing surfaces; wire/sinker EDM for stress-free micro-features; deep hole drilling for internal cooling channels; orbital TIG, EB and laser high-purity welding for vacuum leak-tight bonding.
Professional Semiconductor-Grade Post Processing
- Precision surface finishing: Electropolishing, hard coat Type III anodizing, ASTM-standard passivation, Yttria/alumina ceramic coating and DLC wear-resistant treatment to reduce plasma corrosion and outgassing
- Advanced cleaning: Ultrasonic cleaning and high-purity chemical washing to eliminate residual impurity
- Strict verification: CMM dimensional inspection, helium leak testing down to 1×10⁻⁹ atm·cc/sec and surface roughness profilometer testing
- ISO5 Class100 cleanroom sealed packaging to avoid secondary contamination during delivery
Cleanroom Assembly & Full-Spec Quality Assurance System
All assembly work is completed inside ISO6 Class1000 or higher cleanroom environment to control airborne particles. Our in-house metrology lab is equipped with CMM, optical comparator and roundness tester for full dimensional verification. We perform standardized helium leak detection, RGA residual gas analysis and high-temperature vacuum bake-out for outgassing reduction. Complete material certificates, heat codes and FAIR test documents are archived to satisfy SEMI, RoHS and ITAR compliance requirements.
Check Out the ToolkitFull-Lifecycle Partner Advantages from Design to Shipment
- Professional DFM engineering optimizes product design for better manufacturability and lower outgassing risk;
- Full in-house one-stop service from raw material incoming to cleanroom finished packaging without outsourced intermediate links;
- Flexible production capacity supporting small prototype batches through to large-scale mass manufacturing;
- Full-set strict QA covering dimensional inspection, leak testing and complete batch traceability.
Surface Treatments & Finishes
To enhance performance in plasma and high-vacuum environments:
- Electropolishing (Ra ≤ 0.2µm for stainless steel)
- Anodizing (hard coat, Type III, with sealing)
- Nickel/Electroless Nickel Plating (for corrosion resistance)
- Passivation per ASTM A967
- Aluminum Oxide & Yttria Coating (plasma-resistant)
- DLC (Diamond-Like Carbon) for wear-resistant moving parts
- Vacuum baking (200°C+ for multi-day outgassing reduction)
Core Applications & Components
- Etch (Dry & Wet): Plasma chambers, showerheads, electrodes.
- CVD & ALD: Heaters, gas distribution plates, susceptors.
- PVD: Sputtering targets (backing plates), shields.
- Ion Implantation: Beamline components, Faraday cups.
- Lithography: Precision stages, reticle holders.
- Metrology & Inspection: SEM/TEM stages, mirrors, sample holders.
- Vacuum & Robotics: UHV end-effectors, wafer handling blades.
- Supporting Systems: Pump components, MFC parts, abatement.
FAQs About Semiconductor & Vacuum Components
What semiconductor precision components do you manufacture?
expand_less expand_moreA: We specialize in ultra-clean ESC chucks, showerheads, process chamber parts, wafer handling components, beamline accessories and vacuum shields with low particle generation and outstanding plasma resistance.
Which quality certifications and industrial standards do you follow?
expand_less expand_moreA: Our factory holds ISO9001 certification and complies with SEMI specifications; we implement full lot traceability, FAI and SPC throughout all production processes with complete official test documentation.
Can you customize professional surface coating for vacuum service?
expand_less expand_moreA: Yes, available processes include hard anodizing, stainless steel electropolishing, passivation, Yttria ceramic spray coating and DLC coating to improve anti-plasma, anti-corrosion and wear performance.
What is your standard component lead time?
expand_less expand_moreA: Sample prototypes:4–8 weeks; volume production:6–12 weeks; expedited fast-track service is available for urgent customer orders.
Do you provide DFM design support or only produce per customer drawings?
expand_less expand_moreA: We accept customer CAD drawings for production and also provide collaborative DFM optimization service to improve design cost efficiency and vacuum environmental adaptability.
What certifications and quality standards does your manufacturing process adhere to?
expand_less expand_moreA:Our quality management system is certified to ISO 9001:2015. We operate in controlled environments (cleanrooms as needed) and adhere to stringent industry-specific protocols. Our processes include full traceability (lot control), First Article Inspection (FAI), Statistical Process Control (SPC), and compliance with SEMI standards. Certifications and material test reports are provided upon request.
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